DEVELOPMENT OF STUDYING ON PATTERNING TECHNIQUES OF CVD DIAMOND FILMS

CVD diamond is a promising functional material and has attracted increasing interest, but it is so extrahard and chemically stable that it is difficult to be etched and fabricated. Thus, the technique of morphologically machining CVD diamond is one of the key technique in realizing diamond devices manufacture. According to the practical requirement of diamond film, several patterning techniques of diamond film are described. The advantages and disadvantages of these techniques are analyzed.