STUDY ON THE MECHANICAL PROPERTIES OF DIAMOND LIKE-CARBON FILMS WITH TITANIUM DOPED

Samples with different Ti concentration were prepared by using pure Ti target and changing the number of graphite target or using a grid before the Ti target,to adjust Ti concentration in DLC thin films.Studies shown that the hardness and stress keep decreasing with Ti concentration increased（below 5.3 at.%）.When Ti concentration keep increasing from 5.3 at.% to 18.0 at.%,the hardness keep decreasing,but the stress keep almost constant.The friction coefficient keep constant when the Ti concentration increase from 0 to 6.3 at.%,As the Ti concentration in the thin film keep on increasing,the friction coefficient increase too.