RECENT DEVELOPMENT AND PROSPECTS OF THE MICROMINIATURE STIRLING CYCLE CRYOCOOLERS

With the development of integrated electronic circuits and optoelectronics the development of micro miniature stirling crydogenic and its subsystem（control system, driven system and regenerator, etc） are discussed. It is a critically important feature of the high frequency micrcminiature Stirling that the diameter or other corresponding lateral dimensions of the passageways through the perforate matrix of the regenerator be very small（10~50 microns）. Another critically important feature is that the amplitude of diaphragm vibrations be very small（10~100 microns）. Minimize the irreversibility losses associated with the equipment through the passages.