FILTERED VACUUM ARC ION COATING AND IT'S APPLICATION

WANG Hao. FILTERED VACUUM ARC ION COATING AND IT'S APPLICATION[J]. VACUUM AND CRYOGENICS, 1997, 3(2): 108-111.

Citation:

WANG Hao. FILTERED VACUUM ARC ION COATING AND IT'S APPLICATION[J]. VACUUM AND CRYOGENICS, 1997, 3(2): 108-111.

Citation:

WANG Hao. FILTERED VACUUM ARC ION COATING AND IT'S APPLICATION[J]. VACUUM AND CRYOGENICS, 1997, 3(2): 108-111.

Abstract

A technique-filtered vacuum arc ion coating for thin film deposition-is reviewed in this paper.The typical experimental setup for this technique is deduced in detail,characteristics of arc plasma ions and macroparticles in Aksenov filter are analyzed theoretically.Laesly。some examples about applications and overview of this new technique are discussed.

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