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Graphical Abstract
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Abstract
Dry scroll vacuum pump (DSVP) is a new type oil free mechanical pump.It offers a number of significant advantages,i.e.mechanical simplification,good seal characteristic,lower ultimate pressure (≤ 5×10 -1 Pa).As a highly technical product,it isn't easy to copy and will be applied widely in future.The products are made in only a few corporations overeas.
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