APPLICATION AND PREPARATION OF Al<sub>2</sub>O<sub>3</sub> THIN FILMS

LIU Yong-jie, LIU Yi, DONG Chuang, et al. APPLICATION AND PREPARATION OF Al2O3 THIN FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(4): 236-240.

Citation:

LIU Yong-jie, LIU Yi, DONG Chuang, et al. APPLICATION AND PREPARATION OF Al2O3 THIN FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(4): 236-240.

Citation:

LIU Yong-jie, LIU Yi, DONG Chuang, et al. APPLICATION AND PREPARATION OF Al2O3 THIN FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(4): 236-240.

APPLICATION AND PREPARATION OF Al₂O₃ THIN FILMS

Abstract

Aluminum oxide thin films are widely used in mechanical, optical and microelectronic applications because of their excellent properties, in term of chemical inertness, mechanical strength, hardness, transparency, high abrasive and corrosion resistance, as well as insulating and optical properties. The application and preparation of Al₂O₃ thin films are introduced.

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