WANG Chuan-xin, WANG Jian-hua, MAN Wei-dong, et al. DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 71-76.
Citation:
WANG Chuan-xin, WANG Jian-hua, MAN Wei-dong, et al. DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 71-76.
WANG Chuan-xin, WANG Jian-hua, MAN Wei-dong, et al. DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 71-76.
Citation:
WANG Chuan-xin, WANG Jian-hua, MAN Wei-dong, et al. DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 71-76.
DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS
The status in the researches on synthesizing heteroepitaxial diamond thin films on silicon is introduced. Bias enhanced nucleation,action of SiC in film deposition and effect of different parameters on qualities of heteroepitaxial are summarized.Some problems that worth further researches in this field are presented.
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