PROPERTIES OF DIAMOND LIKE CARBON FILMS PREPARED BY RF MAGNETRON SPUTTERING

Using radio frequency（RF） magnetron sputtering method,diamond-like carbon films（DLC） were deposited on polished stainless steel and silicon wafer substrates.Microstructure,surface morphology and hardness of the films were investigated by Raman spectroscopy,AFM and micro-hardness instrument.The result shows that the films have sp²,sp³ bond and a 3.18 calculated I_D/I_G value relating to sp³ bond content dould be obtained.The surface of the films is very flat and smooth and surface average roughness is 0.17 nm.The hardness of the films is up to 30.8 GPa.