PRESSURE DISTRIBUTION CALCULATION OF FOUR-STAGE DIFFERENCE VACUUM SYSTEM
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Graphical Abstract
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Abstract
The difference vacuum system’s equivalent circuit is introduced,and electrical network analogy method(PSpice) is used to simulate the pressure distribution of four-step difference vacuum system.In the end,a comparison between the simulation results and the experimental results is drawn.In conclusion,PSpice is a good way to simulate the pressure distribution in a complex vacuum system.
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