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Li Gaoyun. A PUMPING SPEED MEASUREMENT APPARATUS FOR THE LARGE Ti-FILM GETTER PUMP[J]. VACUUM AND CRYOGENICS, 1995, 1(1): 2-4.
Citation: Li Gaoyun. A PUMPING SPEED MEASUREMENT APPARATUS FOR THE LARGE Ti-FILM GETTER PUMP[J]. VACUUM AND CRYOGENICS, 1995, 1(1): 2-4.
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A PUMPING SPEED MEASUREMENT APPARATUS FOR THE LARGE Ti-FILM GETTER PUMP

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  • This paper describs a pumping speed measurement method for the 2×105L/s Titanium sublimation pump,Its experiment principle and measurement apparatus are mentioned.
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