MAKING LARGE SCALE ITO FILMS BY USING THE LINE OF CURTAIN WALL GLASS

CHEN Ke, ZOU Qingsheng. MAKING LARGE SCALE ITO FILMS BY USING THE LINE OF CURTAIN WALL GLASS[J]. VACUUM AND CRYOGENICS, 1998, 4(4): 224-226.

Citation:

CHEN Ke, ZOU Qingsheng. MAKING LARGE SCALE ITO FILMS BY USING THE LINE OF CURTAIN WALL GLASS[J]. VACUUM AND CRYOGENICS, 1998, 4(4): 224-226.

Citation:

CHEN Ke, ZOU Qingsheng. MAKING LARGE SCALE ITO FILMS BY USING THE LINE OF CURTAIN WALL GLASS[J]. VACUUM AND CRYOGENICS, 1998, 4(4): 224-226.

Abstract

Through the reformation of the line of curtain wall glass,to produce large scale ITO films by using rectangular plane magnetron sputtering target,and introduce some obvious views about the primary depositing parameters.

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