CUI Jingzhong, DA Daoan, JIANG Wanshun. THE STUDY ON VO2 THERMOCHROMIC FILMS PREPARED BY RF MAGNETRON SPUTTERING[J]. VACUUM AND CRYOGENICS, 1997, 3(3): 128-131.
Citation:
CUI Jingzhong, DA Daoan, JIANG Wanshun. THE STUDY ON VO2 THERMOCHROMIC FILMS PREPARED BY RF MAGNETRON SPUTTERING[J]. VACUUM AND CRYOGENICS, 1997, 3(3): 128-131.
CUI Jingzhong, DA Daoan, JIANG Wanshun. THE STUDY ON VO2 THERMOCHROMIC FILMS PREPARED BY RF MAGNETRON SPUTTERING[J]. VACUUM AND CRYOGENICS, 1997, 3(3): 128-131.
Citation:
CUI Jingzhong, DA Daoan, JIANG Wanshun. THE STUDY ON VO2 THERMOCHROMIC FILMS PREPARED BY RF MAGNETRON SPUTTERING[J]. VACUUM AND CRYOGENICS, 1997, 3(3): 128-131.
THE STUDY ON VO2 THERMOCHROMIC FILMS PREPARED BY RF MAGNETRON SPUTTERING
VO2 thermochromic films were prepared by the magnetron sputtering method. The effects of sputtering parameters on the optical/electrical properties of VO2 films were studied. The transitional properties of VO2 films were characterized by the electrical resistance change in the phase transition process.
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