AN APPARATUS CONTROLLED BY COMPUTER FOR VACUUM GAUGE CALIBRATION
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Graphical Abstract
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Abstract
The apparatus controlled by computer for vacuum gauge calibration is used to calibrate vacuum gauges for routine use from 1×10 5 to 5×10 -4 Pa by the dynamic comparison method, the static expansion method and the static comparison method. It was by a programmalbe controller that the calibration progress was controlled and the working efficiency and reliability improved and the losses caused by wrong operation or malfunction reduced.
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