METHOD OF MEASUREMENT IN HIGH PRESSURE BY QUADRUPOLE MASS SPECTROMETER

The quadrupole mass spectrometer is an instrument for partial pressure measurement.It’s upper limit of linearity is about 10^-3 Pa.The factors which influence the upper limit of linearity and find the method to calculate the partial pressure in high pressure are analyzed.The method was proved to be right by some experiments and the conclusions have reference value for the use of quadrupole mass spectrometer.