DEVELOPMENT OF AN IN SITU VACUUM GAUGE CALIBRATION SYSTEM

LI Zheng-hai. DEVELOPMENT OF AN IN SITU VACUUM GAUGE CALIBRATION SYSTEM[J]. VACUUM AND CRYOGENICS, 2008, 14(4): 231-235.

Citation:

LI Zheng-hai. DEVELOPMENT OF AN IN SITU VACUUM GAUGE CALIBRATION SYSTEM[J]. VACUUM AND CRYOGENICS, 2008, 14(4): 231-235.

Citation:

LI Zheng-hai. DEVELOPMENT OF AN IN SITU VACUUM GAUGE CALIBRATION SYSTEM[J]. VACUUM AND CRYOGENICS, 2008, 14(4): 231-235.

Abstract

An in situ vacuum gauge calibration system is described together with its calibration technology.The system possesses simple structure,practicality and small uncertainty,which can settle for in situ vacuum gauge calibration.

FullText(HTML)

Turn off MathJax

Article Contents

Export File