RESEARCHES ON SURFACE FORM FACTORS OF TiO<sub>2</sub> THIN FILM

WU Zheng-huang, LIU Cheng-chen, LI Wen-jun. RESEARCHES ON SURFACE FORM FACTORS OF TiO2 THIN FILM[J]. VACUUM AND CRYOGENICS, 2001, 7(4): 211-214.

Citation:

WU Zheng-huang, LIU Cheng-chen, LI Wen-jun. RESEARCHES ON SURFACE FORM FACTORS OF TiO2 THIN FILM[J]. VACUUM AND CRYOGENICS, 2001, 7(4): 211-214.

Citation:

WU Zheng-huang, LIU Cheng-chen, LI Wen-jun. RESEARCHES ON SURFACE FORM FACTORS OF TiO2 THIN FILM[J]. VACUUM AND CRYOGENICS, 2001, 7(4): 211-214.

RESEARCHES ON SURFACE FORM FACTORS OF TiO₂ THIN FILM

Abstract

The surface distribution,size and shape of TiO₂ thin film are observed through SEM.The main factors affecting TiO₂ thin film,as temperature,annealing temperature,wafer kinds are studied.It is shown that the temperature about 350～600℃ is good for preparing TiO₂ thin film.

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