Xie Shuping, Guo Yun, Yang Dequan, et al. TARGET FACTOR ANALYSIS IN AES DEPTH PROFILING OF Ti/Al MULTIFILM[J]. VACUUM AND CRYOGENICS, 1995, 1(4): 187-191.
Citation:
Xie Shuping, Guo Yun, Yang Dequan, et al. TARGET FACTOR ANALYSIS IN AES DEPTH PROFILING OF Ti/Al MULTIFILM[J]. VACUUM AND CRYOGENICS, 1995, 1(4): 187-191.
Xie Shuping, Guo Yun, Yang Dequan, et al. TARGET FACTOR ANALYSIS IN AES DEPTH PROFILING OF Ti/Al MULTIFILM[J]. VACUUM AND CRYOGENICS, 1995, 1(4): 187-191.
Citation:
Xie Shuping, Guo Yun, Yang Dequan, et al. TARGET FACTOR ANALYSIS IN AES DEPTH PROFILING OF Ti/Al MULTIFILM[J]. VACUUM AND CRYOGENICS, 1995, 1(4): 187-191.
TARGET FACTOR ANALYSIS IN AES DEPTH PROFILING OF Ti/Al MULTIFILM
Target Factor Analysis（TFA）is kind of mathematical technique for solving multidi-mensional problems of a certain type. By means of the technique,AES depth profiles of Ti/Al multi-film has been thoroughly studied in this paper. Each chemical state of Ti,Al,O, Si elements in depth distribution is obtained,and they were consistent with XPS analysis results.
DownLoad: