PREPARATION TECHNIQUES OF NANOMETER SIZE SEMICONDUCTOR THIN FILMS

YANG Huidong, WANG Hao, DING Ruiqin. PREPARATION TECHNIQUES OF NANOMETER SIZE SEMICONDUCTOR THIN FILMS[J]. VACUUM AND CRYOGENICS, 1999, 5(2): 81-87.

Citation:

YANG Huidong, WANG Hao, DING Ruiqin. PREPARATION TECHNIQUES OF NANOMETER SIZE SEMICONDUCTOR THIN FILMS[J]. VACUUM AND CRYOGENICS, 1999, 5(2): 81-87.

Citation:

YANG Huidong, WANG Hao, DING Ruiqin. PREPARATION TECHNIQUES OF NANOMETER SIZE SEMICONDUCTOR THIN FILMS[J]. VACUUM AND CRYOGENICS, 1999, 5(2): 81-87.

Abstract

A review on the progress of the preparation techniques of nanometer size semiconductor thinfilms is pesented in this paper. The characteristic of each preparation method is also appraised.

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