THE PROPERTIES OF MoS₂+Sb₂O₃ ANTI-COLD WELDING THIN FILM BY MAGNETRON SPUTTERING

MoS₂ has excellent lubrication properties,but sputtered MoS₂ films have obvious shortcomings that they were oxidized easily and the lubrication properties are lost in moist air.In order to resolve the problem,sputtered MoS₂ films dopped with Sb₂O₃ on tribological properties were investigated with ball-disk tester.The microstructure morphology and the chemical states of sputtered MoS₂ films were analyzed using XRD, AFM and XPS.The experimental results indicate the film has dense microstructure, small crystal size and uniform distribution.It has excellent lubrication and anti-cold welding properties, especially applied to solid lubrication of moving mechanisms of satellites.