STUDY OF QUANTITATIVE MEASUREMENT WITH QUADRUPOLE MASS SPECTROMETER

In this paper,the measurement procedure with quadrupole mass spotrometer（QMS）has been discussed theoretically. The prerequisite for reliable quantitative results in gas analysis is decribed and resulting methods and their boundary conditions are presented.Attention is focused on the characteristic properties of QMS: stability,linearity,resolution and sensitivity.The recomman dations for quantitative results with QMS are made.