PREPARATION OF ALUMINUM THIN FILM BY MAGNETRON SPUTTERING

In this paper, Influence of sputtering parameters on properties of aluminum thin films was studied by adjusting sputtering parameters and testing optical properties of aluminum thin films. In addition, Influence of ion beam cleaning on properties of aluminum thin films was studied by adjusting ion beam cleaning times and testing adhesion and optical properties of aluminum thin films. The result revealed that ion beam cleaning has effect on aluminum thin films’ optical properties.