DEVELOPMENT OF SYNTHESIZING CVD DIAMOND FILMS FOR SEMICONDUCTOR MATERIALS

Diamond doped with Ⅲ or Ⅴ subgroup elements is a kind of wide-bandgap semiconductor with superior physical and chemical properties. Due to its exceptional properties, semi-conducting diamond has promising good potentitil in electronic and optoelectronic devices. The current status and technology of diamond doping （including CVD method and ion implantation） were reviewed and the prospect of diamond semiconductor was presented.