ZHOU Zhonghao, QIN Zhiwei, HUANG Guangzhou. THE RESEARCH OF THIN FILM THICKNESS MEASUREMENT BY INTELLIGENT EDDY[J]. VACUUM AND CRYOGENICS, 1997, 3(1): 5-8.
Citation:
ZHOU Zhonghao, QIN Zhiwei, HUANG Guangzhou. THE RESEARCH OF THIN FILM THICKNESS MEASUREMENT BY INTELLIGENT EDDY[J]. VACUUM AND CRYOGENICS, 1997, 3(1): 5-8.
ZHOU Zhonghao, QIN Zhiwei, HUANG Guangzhou. THE RESEARCH OF THIN FILM THICKNESS MEASUREMENT BY INTELLIGENT EDDY[J]. VACUUM AND CRYOGENICS, 1997, 3(1): 5-8.
Citation:
ZHOU Zhonghao, QIN Zhiwei, HUANG Guangzhou. THE RESEARCH OF THIN FILM THICKNESS MEASUREMENT BY INTELLIGENT EDDY[J]. VACUUM AND CRYOGENICS, 1997, 3(1): 5-8.
THE RESEARCH OF THIN FILM THICKNESS MEASUREMENT BY INTELLIGENT EDDY
In this paper,the composition, principle and control relation of the intelligent eddy measurement system of the thin film thickness are discribed,and the measures of precision are analyzed. It is indicated that the thin film thickness measurement by eddy is also a practical method.
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