EXPERIMENTAL STUDY ON CALIBRATION SYSTEM OF MASS SPECTROMETERS FOR PARTIAL PRESSURE
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Graphical Abstract
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Abstract
The technical specifications of the calibration system of mass spectrometers for partial pressure were introduced,and a quadrupole mass spectrometer was calibrated by this calitration system.The calibration results including sensitivity,fragmentation factor,linearity,mass scale and resolving power are presented.In addition,the influences between gases were studied.
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