TO dISCUSS SOME PROBLEM IN DESIGNING VACUUM ENVIRONMENT EQUIPMENT
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Graphical Abstract
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Abstract
The vacuum environment equipment is for special use in industry.It hasn’t have centralized standard in designing for its narrow application and usually different products have different requests.With the characterization of the vacuum testing technique,it points out the view of vacuum chamber designing in vacuum environment equipment and to confirm the minimum size of the shroud and its cover-processing.It also discuss the problem of vacuum air-proof construction which has refrigerant tube.The constructive of the shroud and its calculating in design are confirmed.Choosing throughout of vacuum main pump,heating way,the position of the heater,cooling way,thermal circling design and service proceeding control are designed.Some brief condition in researching and producing the equipment are introduced.Others like the equipment’s testing program and methods have been narratived.
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