VACUUM PRESSURE AUTOMATIC CONTROL TECHNIQUE FOR TINY GAS QUANTITATIVE ANALYSIS

In order to make the vacuum pressure stable rapidly during gas quantitative analysis using mass spectrum or the other automatic measuring and controlling system, an automatic control system with width of gas pulse inlet regulated has been presented. The structure of the system, the mathemacal model, the method of identifying parameters of the vacuum system and the control theory have been conducted.The method has been proven to be efficient by computer simulation experiments.