PREPARATION AND OPTICAL PROPERTY OF BIMETALLIC THIN FILMS FOR LASER DIRECT-WRITE GRAY-LEVEL MASK

MA Feng; WANG Duo-shu; LUO Chong-tai; YE Zi-yu; LIU Hong-kai; WANG Ji-zhou

MA Feng, WANG Duo-shu, LUO Chong-tai, et al. PREPARATION AND OPTICAL PROPERTY OF BIMETALLIC THIN FILMS FOR LASER DIRECT-WRITE GRAY-LEVEL MASK[J]. VACUUM AND CRYOGENICS, 2009, 15(1): 1-4.

Citation:

MA Feng, WANG Duo-shu, LUO Chong-tai, et al. PREPARATION AND OPTICAL PROPERTY OF BIMETALLIC THIN FILMS FOR LASER DIRECT-WRITE GRAY-LEVEL MASK[J]. VACUUM AND CRYOGENICS, 2009, 15(1): 1-4.

Citation:

MA Feng, WANG Duo-shu, LUO Chong-tai, et al. PREPARATION AND OPTICAL PROPERTY OF BIMETALLIC THIN FILMS FOR LASER DIRECT-WRITE GRAY-LEVEL MASK[J]. VACUUM AND CRYOGENICS, 2009, 15(1): 1-4.

PREPARATION AND OPTICAL PROPERTY OF BIMETALLIC THIN FILMS FOR LASER DIRECT-WRITE GRAY-LEVEL MASK

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Zn/Al bimetallic thin films were prepared on glass substrate by RF magnetr-ron sputtering,and deposition parameters of Zn/Al bimetallic thin films was obtained.Applications for laser direct-write gray-level mask were also discussed.

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PREPARATION AND OPTICAL PROPERTY OF BIMETALLIC THIN FILMS FOR LASER DIRECT-WRITE GRAY-LEVEL MASK

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