ANALYSES ON THE FAILURE OF MAGNETIC SPUTTERING MoS2/Sb2O3 COMPOSITE FILMS

JIA Fu-yun; ZHAO Yun-ping; WAN Zhi-hua; YAN Chang-lin; HUANG Liang-fu

JIA Fu-yun, ZHAO Yun-ping, WAN Zhi-hua, et al. ANALYSES ON THE FAILURE OF MAGNETIC SPUTTERING MoS2/Sb2O3 COMPOSITE FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 77-82.

Citation:

JIA Fu-yun, ZHAO Yun-ping, WAN Zhi-hua, et al. ANALYSES ON THE FAILURE OF MAGNETIC SPUTTERING MoS2/Sb2O3 COMPOSITE FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 77-82.

Citation:

JIA Fu-yun, ZHAO Yun-ping, WAN Zhi-hua, et al. ANALYSES ON THE FAILURE OF MAGNETIC SPUTTERING MoS2/Sb2O3 COMPOSITE FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 77-82.

ANALYSES ON THE FAILURE OF MAGNETIC SPUTTERING MoS₂/Sb₂O₃ COMPOSITE FILMS

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The MoS₂/Sb₂O₃ composite films have been prepared by the magnetic sputtering deposition method.Their tribologicol performance,mar resistance and oxidation resistance have been investigated respectively by means of CSEM tribometer,CSEM nano-scratch tester and PHI-5702XPS/AES multifunction electron spectrometer.The detailed analyses have been made on the failure of the films. The lubricating failure mechanism of the films has been researched.

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ANALYSES ON THE FAILURE OF MAGNETIC SPUTTERING MoS2/Sb2O3 COMPOSITE FILMS

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ANALYSES ON THE FAILURE OF MAGNETIC SPUTTERING MoS₂/Sb₂O₃ COMPOSITE FILMS