THE METHODS OF RGA USED IN LAS 2000

WANG Zhiwen, WANG Mingxu, ZHU Yukun, et al. THE METHODS OF RGA USED IN LAS 2000[J]. VACUUM AND CRYOGENICS, 1997, 3(4): 195-200.

Citation:

WANG Zhiwen, WANG Mingxu, ZHU Yukun, et al. THE METHODS OF RGA USED IN LAS 2000[J]. VACUUM AND CRYOGENICS, 1997, 3(4): 195-200.

Citation:

WANG Zhiwen, WANG Mingxu, ZHU Yukun, et al. THE METHODS OF RGA USED IN LAS 2000[J]. VACUUM AND CRYOGENICS, 1997, 3(4): 195-200.

Abstract

The methods of RGA has been studied and applied to LAS 2000 SIMS.Accurately analysed the partial pressure of LAS 2000 SIMS background vacuum,and found there have some hydrocarbons,which mainly affect the analysis of chemical sputtering of graphite bombarded with H(D) ion beam.

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