WANG Jun-xi, DONG Xiang-dan, ZHANG Li-wei, et al. THE RESEARCH PROGRESS OF LINBO3 PIEZOELECTRIC THIN FILMS[J]. VACUUM AND CRYOGENICS, 2010, 16(1): 55-60.
Citation:
WANG Jun-xi, DONG Xiang-dan, ZHANG Li-wei, et al. THE RESEARCH PROGRESS OF LINBO3 PIEZOELECTRIC THIN FILMS[J]. VACUUM AND CRYOGENICS, 2010, 16(1): 55-60.
WANG Jun-xi, DONG Xiang-dan, ZHANG Li-wei, et al. THE RESEARCH PROGRESS OF LINBO3 PIEZOELECTRIC THIN FILMS[J]. VACUUM AND CRYOGENICS, 2010, 16(1): 55-60.
Citation:
WANG Jun-xi, DONG Xiang-dan, ZHANG Li-wei, et al. THE RESEARCH PROGRESS OF LINBO3 PIEZOELECTRIC THIN FILMS[J]. VACUUM AND CRYOGENICS, 2010, 16(1): 55-60.
THE RESEARCH PROGRESS OF LINBO3 PIEZOELECTRIC THIN FILMS
LiNbO3 have many applications in SAW devices due to its excellent piezoelectric and surface acoustic wave properties.This paper gives emphasis on the structure,surface acoustic wave properties and fabrication of LiNbO3 thin films.Finally,the research progresses of LiNbO3/sapphire and LiNbO3/diamond structures in the field of surface acoustic wave were reviewed.
DownLoad: