THE MICROWAVE FIELD DISTRIBUTION CALCULATION IN ANNULAR WAVEGUIDE

A slot antenna model which involves the calculation of microwavefield distribution in annular waveguide is presented.The microwave field distribution has been calculated.The results show that the mircrowave power is supplied near the centre of the vacuum chamber even if the diameter of the annular waveguide is lager than the waveguide wavelength.The theoretical evidence shows that it is possible to produce large area uniform plasma using this plamsa source.