DEVELOPMENT AND APPLICATION OF ZAO THIN FILMS

LU Feng, XU Chenghai, WEN Lishi. DEVELOPMENT AND APPLICATION OF ZAO THIN FILMS[J]. VACUUM AND CRYOGENICS, 2001, 7(3): 125-129.

Citation:

LU Feng, XU Chenghai, WEN Lishi. DEVELOPMENT AND APPLICATION OF ZAO THIN FILMS[J]. VACUUM AND CRYOGENICS, 2001, 7(3): 125-129.

Citation:

LU Feng, XU Chenghai, WEN Lishi. DEVELOPMENT AND APPLICATION OF ZAO THIN FILMS[J]. VACUUM AND CRYOGENICS, 2001, 7(3): 125-129.

Abstract

Because of the complicated preparing processes,the toxicity and the unsteability,ITO films will be replaced by Zao films.The properties of Zao films are introduced emphatically,its merits are discribed,its applicating prospect and its developing tendency are discussed and its diredction of the reseach is put forward.

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