A 12 WORKING UNITS VACUUM EXHAUST SYSTEM OF CLEAN VACUUM SWITCHING TUBE
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Graphical Abstract
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Abstract
This system is used to vacuate and exhaust vacuum switching tube. It consists of a body frame,a main vacuum chamber,12 branchs fore pumping vacuum pipes,an ultra high sluice valve and a ZDB-250 type cryogenic pump.Runing for half year,the whole system has proved to be functionally good.
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