HUANG Liang-fu, JIA Fu-yun. RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS[J]. VACUUM AND CRYOGENICS, 2002, 8(4): 187-196.
Citation:
HUANG Liang-fu, JIA Fu-yun. RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS[J]. VACUUM AND CRYOGENICS, 2002, 8(4): 187-196.
HUANG Liang-fu, JIA Fu-yun. RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS[J]. VACUUM AND CRYOGENICS, 2002, 8(4): 187-196.
Citation:
HUANG Liang-fu, JIA Fu-yun. RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS[J]. VACUUM AND CRYOGENICS, 2002, 8(4): 187-196.
RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS
The basal principles and space applictions of Micro Mechanical Systems are introduced. The detailed status in the research and development of micro sensors, micro actuators, RF-MEMS, MOSEMS, micro devices and micro/nano satellites are presented.
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