THE EFFECT OF VACUUM ANNEALING ON THE PHASE AND MORPHOLOGY OF THE VO_x THIN FILMS

V₂O₅ thin films were prepared by inorganic sol gel method with V₂O₅ powders. Through annealed in vacuum, the V₂O₅ thin films can be transfered to VO₂ films. X ray diffraction（XRD） and atomic force microscopy（AFM） were used to study the phase and morphology of the thin films prepared in different vacuum annealing conditions. The relationships between phases, morphology of VO_x and vacuum annealing conditions were obtained.