THE INFLUENCE OF ANNEALING TEMPERATURE ON THE STRUCTURE AND PROPERTIES OF INDIUM TIN FILMS

ITO thin film with solar transmittance beyond 90% is obtained by the magnetron sputtering and annealed in the atmosphere environment. With the same parameters of discharge, working gas pressure, the now of reactive gas and deposition time etc., the influence of the annealing temperature on the appearance of film surfaces, chemical compositions, crystal structures, optical and electric properties is studied.