STUDY ON THE ABSORPTION THIN FILM LAYERS MONITORING USING TURNING POINT MONITORING APPROACH OF PHOTOELECTRICITY

It is a key technique to accurately control the thickness of optical layer.The absorption materials’ extinction coefficient affection to the monitoring is analysed by the method of characteristic matrix.An example about the affection is analysed.The method to confirming the montoring wavelength and times is afforded.The practical result shows that the capability of films is fine and the monitoring precision of layers is upper even if the influence is considered.