RAMAN ANALYSIS ON GROWTH PROCESS OF CVD DIAMOND FILMS

YANG Shie, LI Hui-jun, BIAN Chao, et al. RAMAN ANALYSIS ON GROWTH PROCESS OF CVD DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 90-92.

Citation:

YANG Shie, LI Hui-jun, BIAN Chao, et al. RAMAN ANALYSIS ON GROWTH PROCESS OF CVD DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 90-92.

Citation:

YANG Shie, LI Hui-jun, BIAN Chao, et al. RAMAN ANALYSIS ON GROWTH PROCESS OF CVD DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 90-92.

Abstract

Laser Raman analyes was carried out to investigate the growth process of CVD diamond films.By Raman spectroscopy,the variation of the relative contents of the diamond and non-diamond carbon phases was discussed,and the residual stresses in the diamond films at different growth stages were estimated.

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