LI Jingqi, SUN Yining, GUO Wantu, et al. SEVERAL METHODS FOR IMPROVING THE RESISTIVITY OF DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 1997, 3(3): 175-177.
Citation:
LI Jingqi, SUN Yining, GUO Wantu, et al. SEVERAL METHODS FOR IMPROVING THE RESISTIVITY OF DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 1997, 3(3): 175-177.
LI Jingqi, SUN Yining, GUO Wantu, et al. SEVERAL METHODS FOR IMPROVING THE RESISTIVITY OF DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 1997, 3(3): 175-177.
Citation:
LI Jingqi, SUN Yining, GUO Wantu, et al. SEVERAL METHODS FOR IMPROVING THE RESISTIVITY OF DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 1997, 3(3): 175-177.
SEVERAL METHODS FOR IMPROVING THE RESISTIVITY OF DIAMOND FILMS
The resistivity of diamond film is an important index for evaluation of its characteristics.The resistivity of as deposited films is fairly low,it can not meet the demond for application,and must be improved by post treatments.Several treatment methods are introduced here,their advantages and disadvantages are compared.
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