PREPARATION AND CHARACTERIZATION OF IR SENSITIVE VANADIUM OXIDE THIN FILMS

LIANG Yao-ting; CUI Jing-zhong; DA Dao-an; LIU Xiang; LI Zhi

LIANG Yao-ting, CUI Jing-zhong, DA Dao-an, et al. PREPARATION AND CHARACTERIZATION OF IR SENSITIVE VANADIUM OXIDE THIN FILMS[J]. VACUUM AND CRYOGENICS, 2004, 10(2): 71-74.

Citation:

LIANG Yao-ting, CUI Jing-zhong, DA Dao-an, et al. PREPARATION AND CHARACTERIZATION OF IR SENSITIVE VANADIUM OXIDE THIN FILMS[J]. VACUUM AND CRYOGENICS, 2004, 10(2): 71-74.

Citation:

LIANG Yao-ting, CUI Jing-zhong, DA Dao-an, et al. PREPARATION AND CHARACTERIZATION OF IR SENSITIVE VANADIUM OXIDE THIN FILMS[J]. VACUUM AND CRYOGENICS, 2004, 10(2): 71-74.

PREPARATION AND CHARACTERIZATION OF IR SENSITIVE VANADIUM OXIDE THIN FILMS

Graphical Abstract

Graphical Abstract

Abstract

Abstract

IR sensitive vanadium oxide thin films have been prepared by reactive magnetron sputtering. Structural and electrical properties have been characterized by AFM, XRD. Influence of deposition parameters on thin film properties was given.

FullText(HTML)

References (0)

Cited By

Turn off MathJax

Article Contents

PREPARATION AND CHARACTERIZATION OF IR SENSITIVE VANADIUM OXIDE THIN FILMS

Graphical Abstract

Abstract

Catalog

Export File

Citation

Format

Content