LI Gong-ping, BAO Liang-man, ZHANG Xiao-dong, et al. THE REVIEW OF PRINCIPLE AND METHOD OF CLUSTERS SOURCE[J]. VACUUM AND CRYOGENICS, 2003, 9(4): 211-216.
Citation: LI Gong-ping, BAO Liang-man, ZHANG Xiao-dong, et al. THE REVIEW OF PRINCIPLE AND METHOD OF CLUSTERS SOURCE[J]. VACUUM AND CRYOGENICS, 2003, 9(4): 211-216.

THE REVIEW OF PRINCIPLE AND METHOD OF CLUSTERS SOURCE

  • The principles and methods of present clusters source apparatus are reviewed systematically. Schematic diagrams of the clusters producing apparatus and the typical applications of clusters sources are described. The outlook of future clusters sources development is presented.
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