FINITE ELEMENT SIMULATION ANALYSIS FOR THE TORSION MICROMIRROR’S DYNAMIC CHARACTERISTICS

Undamped dynamics simulation analysis is carried out for the torsion micromirror in vacuum environment. The main contents of analysis include: modal analysis, harmonic response analysis, transient response analysis. The modal frequency, vibration mode and amplitude frequency characteristics of micromirror device were obtained. The difference of vibration modes in different parts of micromirror was mainly studied.