Abstract: With the increasing demand for materials, it has become a trend to deposit excellent films on the surface of materials to improve the performance of materials. Diamond-like carbon film has the advantages of high hardness, strong corrosion resistance, low friction coefficient, good wear resistance, and attracts more and more attention in the field of industrial manufacturing. This paper introduces the principle of electronic rotary resonance plasma source and surface wave plasma source and their application in the preparation of DLC film, analyzes the main factors affecting the performance of the DLC film during deposition, points out the existing problems, and summarizes that microwave plasma source can produce large area of high density plasma, without electrode contamination , which provides reference for promoting the preparation and application of high-performance DLC film.