陈冠华,刘艳松,王凯,等. 低温靶封口膜上铝镀层开裂对靶丸及冰层的影响分析[J]. 真空与低温,2024,30(3):311−317. DOI: 10.12446/j.issn.1006-7086.2024.03.013
引用本文: 陈冠华,刘艳松,王凯,等. 低温靶封口膜上铝镀层开裂对靶丸及冰层的影响分析[J]. 真空与低温,2024,30(3):311−317. DOI: 10.12446/j.issn.1006-7086.2024.03.013
CHEN G H,LIU Y S,WANG K,et al. Analysis of the effect of cracking of aluminum coating on cryogenic target sealing film on capsule and ice layer[J]. Vacuum and Cryogenics,2024,30(3):311−317. DOI: 10.12446/j.issn.1006-7086.2024.03.013
Citation: CHEN G H,LIU Y S,WANG K,et al. Analysis of the effect of cracking of aluminum coating on cryogenic target sealing film on capsule and ice layer[J]. Vacuum and Cryogenics,2024,30(3):311−317. DOI: 10.12446/j.issn.1006-7086.2024.03.013

低温靶封口膜上铝镀层开裂对靶丸及冰层的影响分析

Analysis of the Effect of Cracking of Aluminum Coating on Cryogenic Target Sealing Film on Capsule and Ice Layer

  • 摘要: 针对低温靶封口膜上铝镀层开裂现象,使用实验方法和CFD仿真方法研究了其对冰层均匀性和靶丸温度场均匀性的影响。通过实验方法确认了封口膜铝镀层开裂的原因是填充气体压力过高。通过CFD模拟方法对比了三种不同的开裂位置。结果表明,低温靶封口膜铝镀层开裂会使靶丸温度场均匀性变差,从而导致冰层均匀性恶化;为避免铝镀层开裂,应控制封口膜内外压差,对实验用靶来说应控制在10 kPa以内;实验中填充气体压力过高引起的铝镀层破裂方式应为整体开裂;封口膜中心区域铝膜开裂对靶丸温度场均匀性的影响最小,外围开裂影响最大。

     

    Abstract: In response to the cracking phenomenon of aluminum coating on the low-temperature target sealing film, the effects of aluminum coating cracking on the uniformity of the ice layer and the uniformity of the target temperature field were studied using experimental methods and CFD simulation methods. Through experimental methods, it was confirmed that the reason for the cracking of the aluminum coating on the sealing film is due to the high pressure of the filling gas. Three different crack locations were compared using CFD simulation methods. The results indicate that the cracking of the aluminum coating on the low-temperature target sealing film can lead to a decrease in the uniformity of the target temperature field, resulting in a deterioration of the uniformity of the ice layer. To avoid cracking of the aluminum coating, the pressure difference between the inside and outside of the sealing film should be controlled, and for experimental targets, it should be controlled within 10 kPa. The fracture mode of the aluminum coating caused by high filling gas pressure in the experiment should be overall cracking. The cracking of the aluminum film in the central area of the sealing film has the smallest impact on the uniformity of the target temperature field, while the cracking of the periphery has the greatest impact.

     

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