光学压力计的标定及应用

Calibration and Application of Optical Manometer

  • 摘要: 搭建了基于光学谐振腔的气体压力测量装置,即光学压力计。使用测量不确定度为0.0011%(k=1)的活塞压力计,对两套独立的光学压力计进行标定,并对光学压力计的测量不确定度进行了系统的分析与评定,最终得到其压力测量的合成标准不确定度。利用该光学压力计对一台标称测量不确定度为0.025%的商用电容薄膜真空计进行多次校准。结果表明,在校准后的1年时间内,该薄膜压力计电容薄膜真空计的测量不确定度可达0.003%,大幅度提高了该商用电容薄膜真空计的测量不确定度。该光学压力计具有较好的长期稳定性,可应用于校准各种商用压力计,提高实际测量不确定度。

     

    Abstract: We developed an instrument for gas pressure calibration based on optical resonance cavities, the so-called optical pressure gauge. Two independent optical pressure gauges were calibrated by a piston pressure gauge with a stated uncertainty of 0.001 1%(k=1). The uncertainty budget of the optical pressure gauge was systematically analyzed, and the overall uncertainty of the system was obtained. The optical pressure gauge was used to calibrate a commercial capacitance diaphragm gauge with a stated uncertainty of 0.025% several times during a period over one year. The results show that the uncertainty can reach 0.003% within one year after calibration. The results demonstrate the use of the optical gauge in calibrating commercial gauges with high accuracy, and also indicate a good long-term stability of the optical pressure gauge. The instrument therefore can be applied to calibrate various commercial pressure gauges to improve the uncertainty of actual measurement.

     

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