王浪平,孙田玮. 液态靶材磁控溅射技术研究进展[J]. 真空与低温,2024,30(5):496−503. DOI: 10.12446/j.issn.1006-7086.2024.05.005
引用本文: 王浪平,孙田玮. 液态靶材磁控溅射技术研究进展[J]. 真空与低温,2024,30(5):496−503. DOI: 10.12446/j.issn.1006-7086.2024.05.005
WANG L P,SUN T W. Research progress on magnetron sputtering with liquid target[J]. Vacuum and Cryogenics,2024,30(5):496−503. DOI: 10.12446/j.issn.1006-7086.2024.05.005
Citation: WANG L P,SUN T W. Research progress on magnetron sputtering with liquid target[J]. Vacuum and Cryogenics,2024,30(5):496−503. DOI: 10.12446/j.issn.1006-7086.2024.05.005

液态靶材磁控溅射技术研究进展

Research Progress on Magnetron Sputtering with Liquid Target

  • 摘要: 随着先进制造业的迅猛发展,对高性能涂层的需求日益增长。以经济高效的方式沉积高性能涂层成为了科学界研究的热点。液态靶材磁控溅射技术因兼备磁控溅射与蒸镀的优点,受到了研究者的广泛关注。从液态靶材磁控溅射技术的基本原理出发,深入分析了放电过程中的特点与等离子体特性,总结了其特点与优势以及在涂层沉积领域的具体应用,最后指出了该技术当前存在的不足之处,并对其未来的发展趋势进行了展望。

     

    Abstract: With the rapid development of advanced manufacturing technology, the demand for high-performance coatings has correspondingly increased. Deposition of high-performance coatings in an economic and efficient way has become a hot topic in scientific research. Due to the advantages of both magnetron sputtering and vapor deposition, the magnetron sputtering technology of liquid target has been widely concerned by researchers. The underlying principles of liquid target magnetron sputtering technology is deeply studied. The discharge characteristics and plasma properties of liquid target magnetron sputtering technology are deeply analyzed. The distinctive features and advantages of liquid target magnetron sputtering technology are summarized, and the specific applications in the field of coating deposition is mainly introduced. The current limitations of this technology are also pointed out, and its future development trends is prospected.

     

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