基于碳纳米管-金属肖特基接触的气体低压传感技术

Low Pressure Gas Sensing Techniques Based on Carbon Nanotube-metal Schottky Contacts

摘要: 碳纳米管（CNT）具有独特的结构和优异的物理性能，在气体吸附的条件下，CNT-金属接触结构的电学性能会发生变化，这种变化可用于气体传感领域。采用Lift-off工艺和介电电泳沉积法（DEP）制备了基于CNT-金属肖特基结的CNT场效应管（CNT-FET）和CNT/Au电阻传感器，并在10⁻⁷~10⁻⁵ Pa的低压力环境下进行了氢气和氮气传感测试。CNT-FET和CNT/Au电阻传感器对氢气具有相似的传感效应，在测试压力区间内电流分别增长0.05 μA和0.14 μA。研制成果探索了低压气体传感的新途径。

Abstract: Carbon nanotube （CNT） has unique structure and excellent physical property. It can be used potentially in gas sensing due to gas adsorptions in CNT-metal contact. The CNT-FET and CNT/Au resistance sensors based on the CNT-metal Schottky junction were constructed by the lift-off and dielectrophoretic （DEP） processes. The sensing performances of two devices were tested for hydrogen and nitrogen gases in low pressure range of 10⁻⁷~10⁻⁵ Pa. The currents of CNT-FET and CNT/Au resistance sensors increased 0.05 μA and 0.14 μA, respectively, which exhibit similar hydrogen sensing performance. The research results have explored a new approach of low pressure sensing.