高功率脉冲磁控溅射及复合技术的研究进展

Research Progress of Hybrid Technique High Power Impulse Magnetron Sputtering

  • 摘要: 高功率脉冲磁控溅射(HiPIMS)技术因具备高离化率、能够形成光滑致密的涂层组织、拥有高的涂层-基底结合强度以及表现出优异的力学性能等优势,成为了涂层沉积领域的研究热点。概述了HiPIMS技术的核心优势,并分析了其沉积速率低、涂层应力高的缺点;介绍了通过波形叠加及同步偏压以及增加辅助装置对HiPIMS技术的改进;综述了与直流磁控溅射(DCMS)、射频磁控溅射(RFMS)、中频磁控溅射(MFMS)和电弧离子镀(AIP)等其他溅射和电弧技术复合来提升涂层沉积效率和性能的最新研究进展,探讨了其在硬质涂层、耐磨材料、功能涂层及器件等领域的应用。最后,对其未来发展进行了展望。

     

    Abstract: High Power Pulsed Magnetron Sputtering (HiPIMS) technique is a high-ionized Physical Vapor Deposition (PVD) technique, which utilizes high pulse peak powers and low pulse duty cycles during the magnetron sputtering process. It has merits of depositing coatings with smooth and dense microstructure, high coating-substrate adhesive strength, and improved properties, including better mechanical properties, oxidation resistance, corrosion resistance, brighter colors, etc. Therefore, the HiPIMS technique becomes the hot topic in the PVD coating research. In this manuscript, the core benefits and drawbacks of the HiPIMS technique are briefly summarized, especially on the good mechanical properties, low deposition rate and high residual stress. Improvements in the HiPIMS techniques are also reviewed, such as varying the HIPIMS pulse shape, superposition of other power pulses on HiPIMS pulses, synchronization of bias voltage on HIPIMS pulses, and addition of auxiliary devices to enhance plasma stability, etc. The up-to-date research progress on improving deposition efficiency and performances by hybridization with other sputtering and arc techniques is also presented, such as Direct Current Magnetron Sputtering (DCMS), Radio Frequency Magnetron Sputtering (RFMS), Medium Frequency Magnetron Sputtering (MFMS) and Arc Ion Plating (AIP). Hybridizing HiPIMS with DCMS alleviated self-sputtering effects and enhanced coating deposition rates. The residual stresses are also decreased. Combining HiPIMS with RFMS compensated for low deposition rates and expanded target availability. Hybridizing HiPIMS with MFMS helped mitigate target poisoning issues and improve deposition rates and coating performance. Combining HiPIMS with AIP techniques effectively increased ionization rates and resulted in improved mechanical properties of coatings and suppressed HiPIMS target arcing. The application of hybrid HiPIMS techniques in hard coatings, wear resistant materials, functional coatings and devices and other fields is also discussed. Furthermore, a prospect for the future development of HiPIMS and its hybrid techniques is also discussed, especially on its pulse power and plasma development, future industrial application and interdisciplinary development.

     

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