Abstract: Depending on its stable and reliable performance and excellent high vacuum detection capability, hot cathode ionization vacuum gauge has been widely used in many industries such as semiconductors, aerospace, and medicine, playing a vital role in ensuring the accuracy of vacuum measurement. However, conventional hot cathode ionization vacuum gauge persistently suffers from critical engineering limitations, including excessive size and incompatibility with parallel microfabrication processes. To solve such problems, an innovative approach was presented. A circuit system was developed with STM32 microcontroller as the control core based on the MEMS hot cathode ionization vacuum gauge previously developed by the research group. The circuit system can apply a precisely regulated 210 V DC bias voltage to the grid of the hot cathode ionization vacuum sensor through a flyback circuit; Additionally, the single chip microcomputer can obtain stable electronic current by adjusting the output current of constant current chip to adjust the heating power of cathode. This is crucial for accurate ion current generation. Meanwhile, the voltage signal converted by the ion current measuring circuit I-V is processed to obtain the pressure value. The overall size of the instrument which combined with the circuit system and MEMS hot ionization vacuum sensor developed by the research group is only ϕ5.5 cm×7.6 cm, which showing advantages in miniaturization and representing an improvement in terms of compactness compared to traditional gauge. The small size of the vacuum gauge enables the instrument to be deployed in spatially constrained applications. In the vacuum test environment, the average emission current of the gauge is 10.1 μA, and its RSD is 0.51%; it can measure pressure from 2.1×10⁻³ Pa to 1.8×10⁻¹ Pa , with a linearity of 3.58%. This research lays a foundation for developing practical wide range MEMS hot cathode ionization vacuum gauge.