热阴极电离真空计温度修正的仿真与实验研究

Simulation and Experimental Research on Temperature Correction of Hot Cathode Ionization Gauge

  • 摘要: 热阴极电离真空计通过加热阴极实现电子热发射,阴极高温引发的温度效应成为影响其测量精度的关键因素。由于阴极区域的气体温度难以直接测量,基于Molflow软件对真空室内不同工况下的热阴极电离真空计进行模拟分析,获得了空间不同区域的压力分布和气体温度分布。开展了实验测试,观察到了热流逸效应的影响;电离真空计的压力示值的变化规律与仿真结果较为一致。将壁面温度作为特征量修正灵敏度,为电离真空计示值压力修正提供了可行方法,提高了热阴极电离真空计的测量精度。

     

    Abstract: The hot cathode ionization gauge, a fundamental instrument for ultra-high vacuum measurement, experiences limitations in measurement accuracy, partly due to temperature effects induced by the high-temperature cathode. These temperature effects pose challenges due to the interplay of multiple scales and mechanisms, rendering the investigation of temperature effects in ionization gauges particularly complex. The presence of a high-temperature filament increases the temperature of gas molecules surrounding the ionization gauge, while the pressure in the cathode region is also temperature-dependent. Given that the gas temperature in the cathode region is challenging to measure directly, simulations of the hot cathode ionization gauge under various operating conditions within the vacuum chamber were performed using Molflow software. This approach facilitated the acquisition of pressure distributions and gas temperature distributions across different spatial regions. Following the correction of the measured pressure using the thermal transpiration equilibrium equation, the corrected results aligned more closely with the true values. Experimental tests indicated that as the wall temperature increased, the temperature of gas molecules also rose, resulting in an increase in pressure within the test region. However, the pressure reading on the ionization gauge decreased. The influence of thermal transpiration was evident, and the variation pattern of the pressure reading on the ionization gauge was found to be relatively consistent with the simulation results. By utilizing the wall temperature as a characteristic parameter to adjust sensitivity, the pressure results were brought closer to the actual values. This approach offers a viable method for correcting the indicated pressure of the ionization gauge, thereby enhancing the measurement accuracy of the hot cathode ionization gauge.

     

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